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# Plenary & Keynote Speaker

## Plenary Speaker

#### Unleashing Power of MEMS for Diversified Applications

Susumu Kaminaga
Toray Industries, Inc./SK Global Advisers
CV
Susumu Kaminaga studied mechanical engineering at the University of Tokyo before joining Sumitomo Precision Products (SPP), Japan in 1969. Through his career with technological background in the industry, he made a lot of achievements for MEMS, especially, R&D and commercialization of deep reactive ion etching (DRIE) technology based on Robert Bosch invented Bosch Process. Initially, he ran Surface Technology Systems (STS) in U.K. to take initiative of the R&D and commercialization of DRIE technology under collaboration with Robert Bosch. The world first DRIE tool was introduced into the market in 1995. The technology has enabled many new MEMS devices to emerge and contribute to rapid growth of MEMS application for automotive, inkjet printers, displays, smartphones, healthcare and IoT. It has been said in the MEMS society that those applications could not be made available without the development and commercialization of DRIE technology. He took various managerial actions such as M&A and foundation of SPP Process Technology Systems (SPTS), which became independent later, and SPP Technologies (SPT) as SPP’s affiliated companies to focus on further development and commercialization of MEMS technologies. He was keeping involved until recently in supporting further development and commercialization of DRIE technology. He has given hundreds of speeches at academia, industry and international conferences. His talk will inspire various researchers, engineers and managers for the purpose of new business creation in the world of IoT and smart societies. He is a 2024 IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award Winner for Development and Commercialization of Deep Reactive Ion Etching Technology.

## Keynote Speakers

#### Towards Wireless Flexible Printed Electronics

Ana Claudia Arias
Professor of Electrical Engineering and Computer Sciences, UC Berkeley
CV
Dr. Ana Claudia Arias is a Professor at the Electrical Engineering and Computer Sciences Department at the University of California in Berkeley and a faculty director at the Berkeley Wireless Research Center (BWRC). Prior to joining the University of California she was the Manager of the Printed Electronic Devices Area and a Member of Research Staff at PARC, a Xerox Company, Palo Alto, CA. She went to PARC from Plastic Logic in Cambridge, UK where she led the semiconductor group. She received her PhD in Physics from the University of Cambridge, UK. Prior to that, she received her master and bachelor degrees in Physics from the Federal University of Paraná in Curitiba, Brazil. Her research focuses on devices based on solution processed materials and application development for flexible sensors and electronic systems. Dr. Arias is a co-founder of InkSpace Imaging, a startup company that aims to commercialized flexible MRI coils for pediatric patients. Ana is also a co-founder of Tierra Metrics, a startup company dedicated to reducing greenhouse gas emissions through data analytics of high-density sensors.

#### Social Implementation of Spintronics Low-Power Semiconductors -Innovation by Semiconductor Game-Changing Techno

Tetsuo Endoh
Representative Director & COO, Power Spin Inc.
CV
Tetsuo Endoh, Representative Director & COO, founded a startup from Tohoku University with the aim of accelerating the social implementation of new technologies such as spintronics low-power semiconductors developed at Tohoku University. Spintronics low-power semiconductors have various characteristics such as high affinity with AI processing, high environment tolerance, etc. Expected application areas include the realization of next-generation mobility, energy-efficient AI computing and data centers, next-generation communication infrastructure and advanced information services using space and the stratosphere, etc.
He graduated from the University of Tokyo and joined Toshiba Corporation in 1987, where he engaged in the R&D and commercialization of NAND memory. In 1995, he became a lecturer at the Tohoku University, and obtained his Ph.D. (Engineering) from Tohoku University in the same year. In 2008, he promoted a professor at the Tohoku University. Since 2012, he has also served as director of Center for Innovative Integrated Electronic Systems, Tohoku University.
He is IEEE EDS Fellow & IEEE SSCS Fellow elected 2023 for contributions to nonvolatile memory and spintronic logic.

#### The Hidden Thread: Water as the Lifeblood of the Semiconductor Age

Slava Libman
CEO, FTD Solutions Inc.
CV
Next-generation semiconductor sites are projected to use as much freshwater as a city with a population of 1 million people. While the value produced from each unit of semiconductor product is extremely high, it is critical to minimize non-beneficial water use and mitigate risks associated with water management. These risks are exacerbated by the circular dependencies emerging from efforts to improve water efficiency. This presentation will delve into these risks and present an innovative, tested approach to address them. This approach has been successfully demonstrated in multiple facilities within the industry, providing opportunities for partnerships and collaborations to achieve the best possible outcomes in terms of performance, cost efficiency, compliance management, and other relevant benefits.
The speaker holds a Ph.D. in Environmental Engineering and is a recognized thought leader in the field of industrial water management. He serves as the co-chair of the Industry Sustainability Roadmap (IRDS), the SEMI Water Reuse Task Force, and the IRDS Yield Enhancement Committee. As the CEO of FTD Solutions, his mission is to drive innovation and productivity in sustainability through the application of advanced technologies and collaborative efforts.

#### Sustainable Electronic Biosensors through Advanced Materials Engineering

Anna-Maria Pappa
Assistant Professor of the Department of Biomedical Engineering, Khalifa University
CV
Anna-Maria Pappa is an Assistant Professor at the Department of Biomedical Engineering at Khalifa University and a visiting scholar at Cambridge University and at the Foundation for Research and Technology – Hellas. Prior to this, she was the Oppenheimer Research fellow at Cambridge University and the Maundslay-Butler Fellow at Pembroke College. She received her PhD in Bioelectronics in 2017 from Ecole des Mines de St Etienne. Anna-Maria is currently leading the bioelectronics and biosystems on chip (LAB-BBC) group focusing on developing sustainable sensors with applications in healthcare and environmental science. Anna-Maria has received multiple awards for her research including the L’Oreal-UNESCO Women in Science award, being listed in the Innovators under 35 MIT technology review and several awards in the area of entrepreneurship and innovation.