
Plenary & Keynote
Plenary speaker

Unleashing Power of MEMS for Diversified Applications
Toray Industries, Inc./SK Global Advisers
CV
Susumu Kaminaga studied mechanical engineering at the University of Tokyo before joining Sumitomo Precision Products (SPP), Japan in 1969. Through his career with technological background in the industry, he made a lot of achievements for MEMS, especially, R&D and commercialization of deep reactive ion etching (DRIE) technology based on Robert Bosch invented Bosch Process. Initially, he ran Surface Technology Systems (STS) in U.K. to take initiative of the R&D and commercialization of DRIE technology under collaboration with Robert Bosch. The world first DRIE tool was introduced into the market in 1995. The technology has enabled many new MEMS devices to emerge and contribute to rapid growth of MEMS application for automotive, inkjet printers, displays, smartphones, healthcare and IoT. It has been said in the MEMS society that those applications could not be made available without the development and commercialization of DRIE technology. He took various managerial actions such as M&A and foundation of SPP Process Technology Systems (SPTS), which became independent later, and SPP Technologies (SPT) as SPP’s affiliated companies to focus on further development and commercialization of MEMS technologies. He was keeping involved until recently in supporting further development and commercialization of DRIE technology. He has given hundreds of speeches at academia, industry and international conferences. His talk will inspire various researchers, engineers and managers for the purpose of new business creation in the world of IoT and smart societies. He is a 2024 IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award Winner for Development and Commercialization of Deep Reactive Ion Etching Technology.
Keynote speakers

TBA
Professor, Electrical Engineering and Computer Sciences
UC Berkeley
CV
TBA

Social Implementation of Spintronics Low-Power Semiconductors -Innovation by Semiconductor Game-Changing Technology-
Representative Director & COO
Power Spin Inc.
CV
Tetsuo Endoh, Representative Director & COO, founded a startup from Tohoku University with the aim of accelerating the social implementation of new technologies such as spintronics low-power semiconductors developed at Tohoku University. Spintronics low-power semiconductors have various characteristics such as high affinity with AI processing, high environment tolerance, etc. Expected application areas include the realization of next-generation mobility, energy-efficient AI computing and data centers, next-generation communication infrastructure and advanced information services using space and the stratosphere, etc.
He graduated from the University of Tokyo and joined Toshiba Corporation in 1987, where he engaged in the R&D and commercialization of NAND memory. In 1995, he became a lecturer at the Tohoku University, and obtained his Ph.D. (Engineering) from Tohoku University in the same year. In 2008, he promoted a professor at the Tohoku University. Since 2012, he has also served as director of Center for Innovative Integrated Electronic Systems, Tohoku University.
He is IEEE EDS Fellow & IEEE SSCS Fellow elected 2023 for contributions to nonvolatile memory and spintronic logic.

Unlocking Solutions for Semiconductor Facility Water Circularity
CEO
FTD Solutions Inc.
CV
Next-generation semiconductor sites are projected to use as much freshwater as a city with a population of 1 million people. While the value produced from each unit of semiconductor product is extremely high, it is critical to minimize non-beneficial water use and mitigate risks associated with water management. These risks are exacerbated by the circular dependencies emerging from efforts to improve water efficiency. This presentation will delve into these risks and present an innovative, tested approach to address them. This approach has been successfully demonstrated in multiple facilities within the industry, providing opportunities for partnerships and collaborations to achieve the best possible outcomes in terms of performance, cost efficiency, compliance management, and other relevant benefits.
The speaker holds a Ph.D. in Environmental Engineering and is a recognized thought leader in the field of industrial water management. He serves as the co-chair of the Industry Sustainability Roadmap (IRDS), the SEMI Water Reuse Task Force, and the IRDS Yield Enhancement Committee. As the CEO of FTD Solutions, his mission is to drive innovation and productivity in sustainability through the application of advanced technologies and collaborative efforts.